IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Vacuum Science & Technology Tuesday Sessions
       Session VST-TuM

Paper VST-TuM5
Study on the Performance Prediction of Turbine Blade under Low Vacuum

Tuesday, October 30, 2001, 9:40 am, Room 125

Session: Turbomolecular, Molecular Drag and Similar Pumps
Presenter: M. Watanabe, Osaka Vacuum, Ltd., Japan
Authors: M. Watanabe, Osaka Vacuum, Ltd., Japan
T. Sawada, Akita University, Japan
T. Ohbayashi, Osaka Vacuum, Ltd., Japan
M. Iguchi, Osaka Vacuum, Ltd., Japan
Correspondent: Click to Email
A turbo molecular pump with the ability to pump a large quantity of gas under a low vacuum is required in the fields of semiconductor and liquid-crystal device manufacturing. In this study, we propose the method of performance prediction for a turbine blade under a low vacuum, which enables the design of high throughput pump. The performance was analyzed with Stokes equation, which governs the low vacuum flow between the turbine blades with small Reynolds numbers. Experiments were carried out with conventional and optimized blade pumps under a low vacuum; throughputs were measured. The comparison between the measurements and the predicted values showed that the present method predicts the performance of the turbo molecular pump in the pressure range under 10 Pa with a sufficient accuracy for practical applications.