IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Vacuum Science & Technology Thursday Sessions
       Session VST-ThA

Paper VST-ThA5
Calibration Stability of Hot Cathode Ionization Gauges: A Discussion of the Importance of Electron Path Length and Gauge Constant

Thursday, November 1, 2001, 3:20 pm, Room 125

Session: Total & Partial Pressure Gauges & Their Calibration
Presenter: R.N. Peacock, Retired
Correspondent: Click to Email

The ion current, I, in an ionization gauge is given by the equation I = K i P where K is the gauge constant, i, the electron current, and P the pressure. Values of K for gauges designed for use at UHV and XHV range from 10/Torr to 10@super 6@/Torr. It is important to know whether calibration stability is sacrificed when K, and the electron path length, are large. Using a simple model, the electron path length is estimated as a function of the probability, @beta@, that an electron will make another pass through the ionizing region. An equation is obtained for K as a function of @beta@. The fractional change in K, @DELTA@K/K, is calculated for a 1% reduction in the probability that an electron will make another pass through the ionizing region. The fractional change is zero for those gauges where the electrons make a single pass, 0.015 for a B-A gauge with K = 25, and 0.91 for a gauge with K = 10@super 4@.