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    Vacuum Science & Technology Monday Sessions
       Session VST-MoP

Paper VST-MoP7
Development of Axial-Emission Ionization Gauge for XHV Measurement

Monday, October 29, 2001, 5:30 pm, Room 134/135

Session: Developments in Vacuum Technology Poster Session
Presenter: Q.D. Sun, Shanghai Jiao Tong University, P.R. China
Authors: Q.D. Sun, Shanghai Jiao Tong University, P.R. China
J.Z. Chen, Shanghai Lamp Factory, P.R. China
Correspondent: Click to Email
An ionization gauge structure, designed as the "Axial-Emission Gauge (AEG)", with the filament and collector plate located on the opposition ends of a helical grid, has many advantages compared to the BA gauge. This unique arrangement gives higher sensitivity (0.28/Pa) lower limiting pressure (2.7x10@super -9@), less divergence in sensitivity between gauges (5%), and it is easier to degas than BA gauge. In order to further lower the limiting measureable pressure of AEG. Five axial-emission type ionization gauges have been developed: the axial-emission self-modulated ionization gauge, the axial-emission suppressor gauge, the axial-emission bent beam, the axial-emission magnetron ionization gauge and the axial-emission magnetron suppressor gauge. In comparison with the conventional gauges, these five AE type gauges have some advantages also same as AEG. All these points make it more suitable for measurement of UHV and XHV.