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    Vacuum Science & Technology Monday Sessions
       Session VST-MoP

Paper VST-MoP5
Peltier Vacuum Gauge@footnote 1@

Monday, October 29, 2001, 5:30 pm, Room 134/135

Session: Developments in Vacuum Technology Poster Session
Presenter: D.H. Jung, POSTECH, S. Korea
Authors: D.H. Jung, POSTECH, S. Korea
Y.H. Jeong, POSTECH, S. Korea
C.D. Park, POSTECH, S. Korea
S.M. Chung, POSTECH, S. Korea
Correspondent: Click to Email
The junction of a thermocouple, conventionally used as a temperature sensor, can work as a point heat source or sink if an electric current flows. This characteristic is well known as the Peltier effect. Utilizing the Peltier effect of a thermocouple, we have developed a new type of the vacuum gauge, Peltier vacuum gauge (PVG). PVG is based on thermal conduction by gases, and consists of a single thermocouple that plays roles of the heater and sensor simultaneously. PVG shows the sensitivity similar to, or better than that of the Pirani gauge or convectron gauge in the range between 10@super -4@ torr and atmosphere. However, what distinguishes PVG from these gauges are: (1) it has appreciable sensitivity even above 10 torr due to the fact that it is a point heat source, which allows more effective gaseous conduction spherically in viscous regime, (2) its simple structure offers a way to the miniaturization of a vacuum sensor appropriate for local, and fast probe as the pressure changes, and (3) it operates at a few degrees above the wall temperature with high sensitivity. @FootnoteText@ @footnote 1@ patent applied.