IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Tribology Thursday Sessions
       Session TR-ThM

Paper TR-ThM5
Low Frictional Force Coating of Boron Nitride - Copper Complex for Ultra High Vacuum by Magnetron Co-sputtering Technique

Thursday, November 1, 2001, 9:40 am, Room 132

Session: Tribological Surface Engineering for Lubrication & Wear Resistance
Presenter: M. Goto, National Institute for Materials Science, Japan
Authors: M. Goto, National Institute for Materials Science, Japan
A. Kasahara, National Institute for Materials Science, Japan
M. Tosa, National Institute for Materials Science, Japan
K. Yoshihara, National Institute for Materials Science, Japan
Correspondent: Click to Email
Boron nitride - copper complex (BN/Cu) coating films were synthesized by a magnetron co-sputter technique. The characteristics of the films such as surface energy, internal stress, surface morphology, elements configuration and adhesion force were measured. Frictional force of the coating films was also measured with a self-made vacuum-friction measuring system from an atmospheric pressure to the pressure of 10-7 Pa. Frictional coefficients of the BN/Cu films as low as 0.1 is achieved in UHV region. It was found that the mixture structure of boron nitride with copper formed under different discharge time was most effective to change the frictional force. This technique is applicable to produce low-frictional force materials for ultra high vacuum system.