IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Tribology Tuesday Sessions
       Session TR+MM-TuP

Paper TR+MM-TuP12
Effects of Metal Dopant Content on Mechanical Properties of Ti-Me-N Films

Tuesday, October 30, 2001, 5:30 pm, Room 134/135

Session: Poster Session
Presenter: H.K. Park, Sungkyunkwan University, Korea
Correspondent: Click to Email
TiN coatings was applied for various application fields, because of a good wear-resistance and a high hardness. Typically, TiN thin films shows the hardness of 2200 kgf/mm@super 2@ and friction coefficient of 0.6. However, in many field, one is looking for a more improved tool which has low friction coefficient and high wear resistance. The main motivation of this study is to characterize the influence of various metal dopant content on TiN thin films. Ti-Me-N thin films were deposited onto steel substrates by PVD processing with a Ti target and various metal target. In this work, we synthesized titanium nitride films similar with reported typical titanium nitride films and synthesized Ti-Cu-N thin films with the addition of elemental copper which is measured improved hardness more than pure TiN films with copper content variables. This films has preferred oriented films of (111) direction. In addition, It was found that there is a strong correlation between content of various metal and film characteristics such as preferred orientation, grain size, hardness, and friction coefficient and so, in future study, improved mechanical properties of TiN films can be controlled and changed by selection and content of elements such as Sn and Ag modifying the film. The Ti-Me-N film will show apparent hardness characteristics and mechanical properties enhancement, when doping element is added onto TiN thin films. Film structure, chemical composition, mechanical properties were investigated by means of X-ray diffraction(XRD), scanning electron microscopy, X-ray photoelectron spectroscopy, wear resistance tester, hardness tester.