IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Tribology Tuesday Sessions
       Session TR+MM-TuP

Paper TR+MM-TuP10
Friction Behavior of Third Element Incorporated Diamond Like Carbon Films in Various Environments

Tuesday, October 30, 2001, 5:30 pm, Room 134/135

Session: Poster Session
Presenter: S.J. Park, Korea Institute of Science and Technology
Authors: S.J. Park, Korea Institute of Science and Technology
K.-R. Lee, Korea Institute of Science and Technology
K.Y. Eun, Korea Institute of Science and Technology
A. Scholl, Lawrence Berkeley National Laboratory
F. Nolting, Lawrence Berkeley National Laboratory
A. Padmore, Lawrence Berkeley National Laboratory
D.-H. Ko, Yonsei University, Korea
Correspondent: Click to Email
Tribological reaction between the steel ball and third element incorporated diamond-like carbon(DLC) film was investigated from the view point of tribochemical reaction. Si and W was selected for third element. Si incorporated DLC films were deposited using r.f. PA-CVD with mixtures of benzene and diluted silane gases. And W incorporated DLC films were deposited using hybrid DC magnetron sputtering system with methane and Ar. Si(100) wafer was used for substrate. Tribological test was performed using ball on disk type wear-rig. AISI52100 steel ball was used for the wear test. The test environments were dry air, humid air, and vacuum. In the case of the Si incorporated DLC film, it was observed that the debris were partly polymerized and finely dispersed when the Si concentration was larger than 5 at.%, which resulted in low and stable friction behavior in humid air. In dry air, the chemical bond structure of the debris was essentially the same as those in humid air. However, the debris of smaller size has more spherical shape. But in vacuum the debris at low Si concentration showed typical NEXAFS spectrum of a polymer. The polymeric component in the debris decreased as the Si concentration increased In W incorporated DLC films, it has lower friction coefficient but higher wear rate than a-C:H films made by PA-CVD. By analysis of the composition of debris, its friction behaviors were closely related to the formation of the silicon-rich oxide debris.