IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Thin Films Tuesday Sessions
       Session TF-TuP

Paper TF-TuP6
Fabrication of Perforated Thin Films with Helical and Chevron Pore Shapes

Tuesday, October 30, 2001, 5:30 pm, Room 134/135

Session: Microstructure, Oxides, and Optical Properties Poster Session
Presenter: K.D. Harris, University of Alberta, Canada
Authors: K.D. Harris, University of Alberta, Canada
M.J. Brett, University of Alberta, Canada
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We will present a simple method for the fabrication of thin films or membranes perforated by helical and chevron shaped pores. Using the glancing angle deposition (GLAD) evaporation technique highly porous (40-50% of bulk density) SiO@sub 2@ thin films of helical and chevron microstructure were deposited on Si substrates. Typical thin films have thicknesses on the order of 2µm and are composed of 1 to 20 turns. The thin films produced by this technique were filled with photoresist and, subsequently, etched to remove the helices, leaving a continuous photoresist cast of the original film. It has been found possible to produce these perforated photoresist films from microstructures distributed either randomly over the substrate, or from structures grown on well defined, periodic arrays of micrometer or sub-micrometer spacings. The perforations have been produced in both chevron and helical shapes, and both photoresist and spin-on-glasses have been successfully used to fill the template. In addition, it has been found possible to electroplate back up through the perforated thin film, reproducing the structure of the original template with an alternate material. The fabrication processes will be discussed along with the results of optical and magnetic characterization of the films.