IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Thin Films Tuesday Sessions
       Session TF-TuP

Paper TF-TuP18
Development of a New Luminescence Spectrum from ZnS:Mn Films

Tuesday, October 30, 2001, 5:30 pm, Room 134/135

Session: Microstructure, Oxides, and Optical Properties Poster Session
Presenter: T. Satoh, Kanagawa University, Japan
Authors: T. Hirate, Kanagawa University, Japan
N. Orihara, Kanagawa University, Japan
T. Satoh, Kanagawa University, Japan
Correspondent: Click to Email
ZnS Films with a new electroluminescence and photoluminescence spectrum were prepared by the modified chemical vapor deposition method developed by us. The deposition method is a low pressure thermal CVD system basically concerning the synthesis of ZnS matrix except that the metal Mn target is set in the deposition chamber. The two main precursors used to synthesize the ZnS are the metal Zn vapor and H2S. The pulsed Nd:YAG laser beam (wavelength =1.064µm) was used to ablate the Mn target and to dope Mn into the growing ZnS film. The crystal structure of the deposited ZnS:Mn films was analyzed by XRD and the composition was analyzed by EDX and by XPS. The crystallinity of the films was generally poor and it was proven that the deposited ZnS:Mn films consisted only of Zn, S and Mn within the limits of detection by the EDX and XPS analysis. The electroluminescence (EL) spectrum of the ZnS:Mn films hitherto reported has a peak at about 5850Å and the photoluminescence (PL) spectrum has also the main peak at the same wavelength. On the other hand, the EL spectrum of this study has a new peak at 6700Å other than the peak at 5850Å, and the PL spectrum has a strong and wide peak at 7000Å and the intensity at 5850Å is very weak. It was experimentally confirmed that the appearance of these spectra is not due to the concentration of Mn and not due to the interference. We discovered these new spectra and the discrepancy between EL and PL spectrum for the first time. We consider that these may be due to any excited state of Mn generated by the high laser energy density, and that this deposition method has a high probability of development of a new spectrum.