IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Thin Films Tuesday Sessions
       Session TF-TuP

Paper TF-TuP1
MEVVA Ion-implanted Cr Interlayer on the Microstructure of CrN on Steel

Tuesday, October 30, 2001, 5:30 pm, Room 134/135

Session: Microstructure, Oxides, and Optical Properties Poster Session
Presenter: H.C. Shih, National Tsing Hua University, R.O.C.
Authors: S. Han, National Taichung Institute of Technology, R.O.C.
J.-H. Lin, National Tsing Hua University, Taiwan, ROC
Z.C. Chang, National Chin-Yi Institute of Technology, R.O.C.
C.J. Yang, National Chung Hsing University, R.O.C.
F.-S. Shieu, National Chung Hsing University, R.O.C.
H.C. Shih, National Tsing Hua University, R.O.C.
Correspondent: Click to Email
The effect of MEVVA ion-implantation of Cr on the microstructure and properties of CrN coatings on the steel were investigated in this paper. Two types of CrN-coated specimens (CrN/steel and CrN/Cr/steel) by cathodic arc plasmas deposition were prepared with and without an interlayer deposited by MEVVA ion-implantation of Cr. And the microstructure and microchemistry of chromium nitride has been investigated by using X-ray diffraction (XRD), cross-sectional transmission electron microscopy (XTEM) and selected area diffraction (SAD). Therefore, the coatings exhibit a microcolumnar morphology. The outermost layer of the coating is identifed as CrN. Furthermore, from an estimation of the unrelaxed thermal stresses based on a bilayer model, it is demonstrated that the presence of a Cr interlayer between CrN and steel can dramatically reduced the thermal stress in the CrN coating.