IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Thin Films Friday Sessions
       Session TF-FrM

Paper TF-FrM8
Structure and Properties of Carbon Nitride Thin Films Synthesized by Nitrogen-Ion-BeamAssisted Pulsed Laser Ablation

Friday, November 2, 2001, 10:40 am, Room 123

Session: Diamond and Related Materials
Presenter: Z.Y. Chen, National Institute of Advanced Industrial Science and Technology, Japan
Authors: Z.Y. Chen, National Institute of Advanced Industrial Science and Technology, Japan
J.P. Zhao, National Institute of Advanced Industrial Science and Technology, Japan
T. Yano, National Institute of Advanced Industrial Science and Technology, Japan
T. Ooie, National Institute of Advanced Industrial Science and Technology, Japan
Correspondent: Click to Email
Carbon nitride films were deposited by pulsed KrF excimer laser ablation of graphite with assistance of low energy nitrogen-ion-beam bombardment. The nitrogen to carbon ratio, bonding state, microstructure, surface morphology, and electrical property of the deposited carbon nitride films were characterized by x-ray photoelectron spectroscopy (XPS), Fourier transform infrared (FTIR) spectroscopy, micro-Raman spectroscopy, atomic force microscopy (AFM), and four-probe resistance. The irradiation effect of the nitrogen ion beam with various ion currents on the synthesis of carbon nitride films was investigated. XPS and FTIR analyses indicated that the bonding state between the carbon and nitrogen in the deposited films was significantly influenced by the nitrogen irradiation with different ion currents during deposition. The carbon-nitrogen bonding of C-N and C=N was observed in the films. High nitrogen ion current was proposed to promote the desired sp@super 3@-hybridized carbon and the C@sub 3@N@sub 4@ phase. In addition, the tribological properties of the carbon nitride films deposited on TiN coated stainless steel substrates were also studied in both dry and oil environments, which exhibited a low friction coefficient and low wear compared to hard TiN film and commercial stainless steel.