IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Surface Science Thursday Sessions
       Session SS4-ThP

Paper SS4-ThP5
Growth of Cu on Si(5 5 12)

Thursday, November 1, 2001, 5:30 pm, Room 134/135

Session: Semiconductor Morphology Poster Session
Presenter: P.H. Woodworth, Virginia Commonwealth University
Authors: P.H. Woodworth, Virginia Commonwealth University
J.C. Moore, Virginia Commonwealth University
J.L. Skrobiszewski, Virginia Commonwealth University
A.A. Baski, Virginia Commonwealth University
Correspondent: Click to Email

We have used scanning tunneling microscopy (STM) to study the growth behavior of Cu on the row-like surface of Si(5 5 12). Our prior work concerning noble metal growth (Au, Ag) on this surface has shown a variety of row-like overlayer structures and Au-stabilized facet planes.@footnote 1@ This study compares and contrasts the growth behavior of Cu to its counterparts. At very low coverage (<0.1 ML) and moderate annealing temperatures (600°C), Cu induces faceting of the (5 5 12) surface to the nearby (337) and (5 5 13) planes, neither of which is a stable clean Si surface. Faceting to (337) has also been observed for low-coverage Au deposition, indicating a similarity between these two metals. In contrast to both Au and Ag growth, however, Cu is not seen to form row-like overlayer structures on the basal Si(5 5 12) surface. At higher coverages up to one monolayer, Cu causes the surface to form sawtooth facets comprised of (113) and (111) planes, where an ordered (113)2x2 reconstruction is observed. Interestingly, a large number of domain boundaries form between the 2x2 regions, resulting in a "weave-like" pattern of short rows. The stabilization of the (113) plane by metal deposition on (5 5 12) has also been observed for Au, Ag, and Sn deposition, but the 2x2 reconstruction is unique to Cu. Results for Cu deposition on (113) to produce the 2x2 phase will also be presented. @FootnoteText@ @footnote 1@ A.A. Baski, K.M. Jones, K.M. Saoud, Ultramicroscopy 86 23 (2001).