IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Surface Science Thursday Sessions
       Session SS3-ThP

Paper SS3-ThP12
Adsorption and Reaction of s-Triazine on Al(111)

Thursday, November 1, 2001, 5:30 pm, Room 134/135

Session: Surface Reactions Poster Session
Presenter: V.J. Bellitto, Naval Research Laboratory
Authors: V.J. Bellitto, Naval Research Laboratory
B. Bartlett, Naval Research Laboratory
J.M. Valdisera, Naval Research Laboratory
J.N. Russell, Jr., Naval Research Laboratory
Correspondent: Click to Email
Polycyanurates, cyanate ester resins with low-k-dielectric properties, are useful for the fabrication of microelectronic devices. Formed by the trimerization of monomers with cyanate functionalities, the polymer linkage in polycyanurates is a triazine ring. To understand how this linkage interacts with aluminum, a material used as interconnects in microelectronics, we examined the chemical interaction of 1,3,5-Triazine (C@sub 3@H@sub 3@N@sub 3@) and its isotopomer (C@sub 3@D@sub 3@N@sub 3@) on Al(111) using infrared reflection absorption spectroscopy (IRRAS), x-ray photoelectron spectroscopy (XPS), and temperature programmed desorption (TPD). A multilayer of triazine was produced by dosing the Al(111) surface while held at 140 K. Based on IRRAS measurements, triazine was randomly oriented in the multilayer. The multilayer desorption peak temperature occurred at 173 K, leaving a monolayer of triazine on the surface. At surface temperatures between 205 K and 300 K, similar IRRAS spectra were observed, showing modes at 1564 and 1341 cm@super -1@ and the absence of a mode at 737 cm@super -1@. Symmetry analysis of the IRRAS spectrum indicates the triazine molecular plane is tilted with respect to the Al(111) surface in the adsorbed monolayer, bonding through one of the nitrogen lone pairs. Thermal decomposition product desorption began around 425 K. HCN and H@sub 2@ desorption were observed, but surprisingly CH@sub 4@ and C@sub 2@H@sub 4@ desorption were also detected. Monitoring the decomposition products of C@sub 3@D@sub 3@N@sub 3@ confirmed the product assignments. Consistent with the desorption results, around 425 K the beginning of carbide and nitride formation was observed with XPS. Above 750 K, decomposition product desorption ceased. A broad phonon mode was observed at ~800 cm@super -1@ due to the formation of AlC@sub x@N@sub y@.