IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Surface Science Monday Sessions
       Session SS3-MoP

Paper SS3-MoP4
The Surface Modification of PZT by Ion Bombardment

Monday, October 29, 2001, 5:30 pm, Room 134/135

Session: Clusters and Aerosols Poster Session
Presenter: J.M. Choi, Samsung Advanced Institute of Technology, Korea
Authors: J.M. Choi, Samsung Advanced Institute of Technology, Korea
H.I. Lee, Korea Research Institute of Standards and Science (KRISS)
J.C. Lee, Samsung Advanced Institute of Technology, Korea
D.W. Moon, Korea Research Institute of Standards and Science (KRISS)
Correspondent: Click to Email
The surface of PZT (Pb@sub 1.0@Zr@sub 0.4@Ti@sub 0.6@O@sub 3.0@) film is modified by ion bombardment or reactive ion etching (RIE) process.@footnote 1,2,3@ In this work, Auger electron spectroscopy (AES),X-ray photoelectron spectroscopy (XPS), medium energy ion scattering spectroscopy (MEIS) and transmission electron microscope (TEM) were adapted to quantitatively analyze the modified surface layer. The AES and XPS depth profiles always show a rapid decrease of Pb intensity in the initial stage of sputter depth profiling, which has been known as the results of surface segregation of Pb@footnote 3@. But MEIS and TEM clearly showed that it is due to the formation of Pb depleted layer due to Pb preferential sputtering. The reduction of Pb concentration in the modified surface layer was about 30% and the thickness of Pb depleted layer was about 13nm by MEIS, in agreement with a 13.2nm thick amorphic layer observed by TEM. XPS spectra showed that Pb 4f shifted to the metallic phase, whereas Zr 3d and Ti 2p shifted to the ZrO@sub 2@ and TiO@sub 2@ phase. Preliminary results on recovery of the Pb depletion by electron beam bombardment and thermal treatment will be reported. @FootnoteText@ @footnote 1@Sharmila M. Mukhopadhyay and Tim C.S. Chen. J. Appl.Phys. 74(2),872(1993).@footnote 2@June Key Lee et al. Appl. Phys. Lett.75,No.3,334(1999).@footnote 3@Yin-yin Lin,Qin Liu,Ting-ao Tang and Xi Yao. Appl. Surf. Sci.165,34(2000).