We describe an experimental setup that allows us to investigate physical and chemical properties of supported metal clusters on various substrates at low impact energies(<10eV/atom). The metal cluster ions are generated by a laser ablation source, mass selected, and deposited on substrates. The performance of this instrument is illustrated with supported metal clusters (V, Ni, and Ir) on titania and graphite. Electronic structure of the supported metal clusters and chemical reactions over them will be studied by XPS and TPD, respectively, in terms of cluster size, impact energy and substrate defects.