IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Surface Engineering Tuesday Sessions
       Session SE-TuA

Paper SE-TuA8
Cubic Boron Nitride Thin Films Deposited on Steel Substrates With Different Interlayers

Tuesday, October 30, 2001, 4:20 pm, Room 132

Session: Hard and Superhard Coatings
Presenter: M.P. Delplancke-Ogletree, Universite Libre de Bruxelles, Belgium
Authors: M. Ye, Universite Libre de Bruxelles, Belgium
M.P. Delplancke-Ogletree, Universite Libre de Bruxelles, Belgium
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Cubic boron nitride thin films were deposited on steel substrates using electron cyclotron resonance plasma enhanced chemical vapor deposition. Different interlayers, such as BCN, TiBN, Ti, TiN, and hexagonal boron nitride, were investigated regarding to the promotion of cubic boron nitride growth and the improvement of the film mechanical properties. A systematic optimization procedure for the cubic boron nitride formation was carried out regarding the deposition conditions, including the gas composition, substrate temperature, bias voltage. The films were characterized using Fourier transform infrared spectroscopy, transmission electron microscopy, x-ray photoelectron spectroscopy, and atomic force microscopy. It was found that among the different interlayers, hexagonal boron nitride gives the best results.