IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Nanometer Structures Thursday Sessions
       Session NS-ThP

Paper NS-ThP15
The Carbonitride Nanostructures Synthesized by Microwave Plasma Enhanced Chemical Vapor Deposition in an Acetylene / Ammonia Plasma System

Thursday, November 1, 2001, 5:30 pm, Room 134/135

Session: Poster Session
Presenter: S.-H. Lai, National Tsing Hua University, Taiwan
Authors: S.-H. Lai, National Tsing Hua University, Taiwan
K.-H. Hong, National Tsing Hua University, Taiwan
H.C. Shih, National Tsing Hua University, Taiwan
Correspondent: Click to Email
The carbonitride nanostructures consisting of nanotubes and nanofibers have been synthesized on Pd-coated porous silica by microwave plasma enhanced chemical vapor deposition (MPECVD) at a temperature of about 600°C and the precursors are H@sub2@, C@sub2@H@sub2@, NH@sub3@, and N@sub@2. The condition of Pd clusters was varied with the power density and the bias to the substrate during the plasma immersion ion implantation (PIII) process. Samples were analyzed by SEM, HRTEM, EELS, and XPS. It was found that carbonitride nanostructures are strongly affected by the surface morphology of the Pd implant layer and the N content. HRTEM and EELS studies showed that the degree of linearity and graphitization of the nanostructure decreases as the N content increases. Nevertheless, the field emission properties of the nanostructures are enhanced due to the N doping. Form the XPS results, N is either bonded to two C atoms (sp@super2@ pyridine-like type) or to three (sp@super3@ bridgehead-nitrogen type) in the hexagonal sheets.