IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Magnetic Interfaces and Nanostructures Tuesday Sessions
       Session MI-TuP

Paper MI-TuP3
Magnetic and Structural Properties of Fe- and Mn-Implanted SiC

Tuesday, October 30, 2001, 5:30 pm, Room 134/135

Session: Emerging Materials & Nanostructures Poster Session
Presenter: N. Theodoropoulou, University of Florida
Authors: N. Theodoropoulou, University of Florida
A.F. Hebard, University of Florida
S.N.G. Chu, Bell Laboratories, Lucent Technologies
M.E. Overberg, University of Florida
C.R. Abernathy, University of Florida
S.J. Pearton, University of Florida
R.G. Wilson, Consultant
J.M. Zavada, U. S. Army European Research Office, UK
Correspondent: Click to Email
P-type 6H-SiC substrates were implanted with Mn@super +@ or Fe@super +@ at doses of 3-5x10@super 16@ cm@super -2@ under conditions that avoided amorphization (substrate temperate ~350°C). After annealing at 700-1000°C, the magnetic properties of the samples were examined by SQUID magnetometry. The Mn-implanted SiC did not show any magnetization, remaining paramagnetic, but the Fe-implanted samples showed ferromagnetic properties below 200 K for the highest dose employed. The origin of the ferromagnetism is not the formation of secondary phases involving precipitation of the Fe. Results for Ni and Co implantation will also be presented, along with a comparison of data for implantation of the same elements into p-GaN epitaxial layers.