IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11)
    Magnetic Interfaces and Nanostructures Monday Sessions
       Session MI+NS-MoA

Paper MI+NS-MoA2
Fabrication of Nanomagnet Arrays using Anodic Porous Alumina

Monday, October 29, 2001, 2:20 pm, Room 110

Session: Nano Magnetics
Presenter: J.H. Choi, Seoul National University, Korea
Authors: J.H. Choi, Seoul National University, Korea
H.-Y. Kang, Seoul National University, Korea
W.-G. Park, Seoul National University, Korea
Y. Kuk, Seoul National University, Korea
Correspondent: Click to Email
Anodic porous alumina has attracted increasing attention because of its naturally self-ordered porous structure and the capability for the fabrication of dots in nanometer scale. We present two fabrication processes of nanomagent arrays using anodic porous alumina. Electrochemically polished aluminum sheet is anodized in oxalic and sulfuric acid under constant voltage condition and porous alumina is used as a template. Co is electrodeposited in the pore of alumina and the deposition is stopped before Co fills the pore completely. Finally, ion milling is used to remove the upper side of alumina and get smooth surface. In the second process, we use anodic porous alumina as a mold for imprint lithography. Anodic porous alumina is placed on the PMMA/SiO@sub 2@/Co multilayer for the imprint. Hexagonal dot arrays are generated on PMMA and pattern-transferred to lower Co layer using reactive ion etching and ion milling. In both processes, nanomagnet arrays with the size of 40 ~ 100nm are successfully fabricated. The magnetic properties of the particles and their interactions have been investigated by spin polarized scanning tunneling microscopy, magnetic force microscopy and spin polarized scanning electron microscopy.