| AVS 47th International Symposium | |
| MEMS | Friday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | MM+VT-FrM1 Invited Paper Micromechanical Devices for Force Measurement T.W. Kenny, Stanford University |
| 9:00am | MM+VT-FrM3 Invited Paper Developing MEMS Vacuum Pumps E.P. Muntz, University of Southern California |
| 9:40am | MM+VT-FrM5 Miniaturized Fuel Cell for Portable Power H.L. Maynard, J.P. Meyers, Lucent Technologies, Bell Laboratories |
| 10:00am | MM+VT-FrM6 Invited Paper Nanotribology and Stiction Studies of Surface Micromachined Electrostatic Micromotors Using An Atomic Force/Friction Force Microscope S. Sundararajan, B. Bhushan, The Ohio State University |
| 10:40am | MM+VT-FrM8 Characterizing Coupled MEM Oscillators for Array Applications R. Baskaran, Cornell University, K.L. Turner, University of California, Santa Barbara |
| 11:00am | MM+VT-FrM9 Tunable Mechanical Oscillator M.K. Zalalutdinov, B. Ilic, A. Zehnder, J.M. Parpia, H.G. Craighead, Cornell University |
| 11:20am | MM+VT-FrM10 Thermal Characteristics of Microswitch Contacts X. Yan, N.E. McGruer, Northeastern University, S. Majumder, Analog Devices, G.G. Adams, Northeastern University |