AVS 47th International Symposium
    Thin Films Thursday Sessions
       Session TF-ThA

Paper TF-ThA9
Effect of Vacuum Deposited Polymer Substrate Roughness on ITO Electrical and Optical Properties

Thursday, October 5, 2000, 4:40 pm, Room 203

Session: Transparent Optical Coatings
Presenter: M.A. Roehrig, Presstek, Inc.
Authors: M.A. Roehrig, Presstek, Inc.
C.I. Bright, Presstek, Inc.
Correspondent: Click to Email
Increasing interest in next generation flexible flat panel display (FPD) materials and substrates has spurred research into improved/optimized ITO thin films deposited on polymer substrates. Requirements for FPD on flexible substrate are such that high conductivity and optical transmittance must be achieved for very thin ITO thin films, e.g. d@sub ITO@ - 5 nm to 100nm. At these thicknesses, polymer substrate roughness is expected to effect optical and electrical performance of the deposited ITO films making it difficult to achieve the high quality FPD requirements. An organic material vacuum deposition technique with the ability to control polymer film thickness from a few 10's of nanometers to several microns has been combined with ITO deposition from both ceramic (90% In@sub 2@O@sub 3@/ 10% SnO@sub 2@) and metal (90% In/ 10% Sn) targets. The effects of vacuum deposited polymer layer thickness and surface roughness effects on the electrical and optical properties of ITO thin films have been measured. Visible range optical performance, surface profilometry and electrical conductivity measurements, including carrier concentrations and mobilities, have been correlated with the vacuum deposited polymer layer thickness and surface roughness measurements.