AVS 47th International Symposium
    Thin Films Thursday Sessions
       Session TF-ThA

Paper TF-ThA3
Preparation of Transparent Conducting Thin Films using Multicomponent Oxides Composed of ZnO and V@sub 2@O@sub 5@ by Magnetron Sputtering

Thursday, October 5, 2000, 2:40 pm, Room 203

Session: Transparent Optical Coatings
Presenter: T. Miyata, Kanazawa Institute of Technology, Japan
Authors: T. Miyata, Kanazawa Institute of Technology, Japan
S. Suzuki, Kanazawa Institute of Technology, Japan
H. Toda, Kanazawa Institute of Technology, Japan
T. Minami, Kanazawa Institute of Technology, Japan
Correspondent: Click to Email
Recently, multicomponent oxides consisting of a combination of different binary or ternary compounds have recently attracted much attention as new transparent conducting oxide (TCO) materials. In this paper, we describe the preparation of TCO thin films using new multicomponent oxides of the ZnO-V@sub 2@O@sub 5@ system. Films were prepared on substrates at temperatures ranging from room temperature (RT) to 350@super o@C by conventional planar magnetron sputtering using powder mixtures of ZnO and V@sub 2@O@sub 5@ as the target. The carrier concentration of vanadium-doped ZnO (ZnO:V) films prepared using ZnOV@sub 2@O@sub 5@ targets markedly increased as the V@sub 2@O@sub 5@ content was increased from 0 to about 15 wt.%, whereas the Hall mobility decreased gradually. As a result, the resistivity of ZnO:V thin films reached a minimum at a V@sub 2@O@sub 5@ content of about 15 wt.%, and markedly increased with V@sub 2@O@sub 5@ contents above about 20 wt.%. Films prepared with V@sub 2@O@sub 5@ contents of about 50 to 70 wt.% were highly resistive or insulators and identified as a ternary compound, ZnV@sub 2@O@sub 4@. In contrast, the resistivity of films markedly decreased as the V@sub 2@O@sub 5@ content was increased from about 80 to 100 wt.%. A 100 wt.% vanadium oxide film with a thickness of 25 nm exhibited a resistivity of 5-10@super -4@@ohm@cm and an average transmittance above 70% in the visible range. In addition, this report describes the chemical properties and the impurity doping effect of TCO films using new multicomponent oxides of the ZnO- V@sub 2@O@sub 5@ system.