AVS 47th International Symposium
    Surface Science Tuesday Sessions
       Session SS-TuP

Paper SS-TuP16
Absolute Determination of the Stoichiometry of Ultrathin Oxide Films as a Function of Thickness: Antimony Oxide on Gold

Tuesday, October 3, 2000, 5:30 pm, Room Exhibit Hall C & D

Session: Poster Session
Presenter: A.J. Slavin, Trent University, Canada
Authors: K. Stefanov, Trent University, Canada
A.J. Slavin, Trent University, Canada
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As the thickness of oxides in microelectronic devices decreases, it has become essential to know how oxide stoichiometry evolves with film thickness. This work uses a high-stability quartz crystal microbalance@footnote 1@ which can provide an absolute determination of stoichiometry as it evolves one molecular layer at a time. In the case of antimony films on a gold substrate, the first two monolayers of Sb oxidize as SbAuO, whereas subsequent layers oxidize as Sb@sub2@O@sub3@. @FootnoteText@ @footnote 1@ S.S. Narine and A.J. Slavin, J. Vac. Sci. Technol. A16, 1857 (1998).