AVS 47th International Symposium
    Surface Science Tuesday Sessions
       Session SS-TuP

Paper SS-TuP13
The Orientational Effects under Ion Grazing Incidence on the GaP(100) Surface

Tuesday, October 3, 2000, 5:30 pm, Room Exhibit Hall C & D

Session: Poster Session
Presenter: U.O. Kutliev, Urganch State University, Uzbekistan
Authors: U.O. Kutliev, Urganch State University, Uzbekistan
A.A. Dzhurakhalov, Institute of Electronics, Uzbekistan
B.C. Kalandarov, Urganch State University, Uzbekistan
Correspondent: Click to Email
Research of laws of grazing scattering of ions begins with study of the form of trajectories of scattering particles. The forms these trajectories are rather difficult, as they are determined large by number correlated of collisions. This circumstance not allows to receive the analytical decision of the given task. By unique effective way of account of the form of trajectories grazing scattering is the modeling on the computer. In the present work the scattering processes on the GaP(100) surface under grazing ion bombardment have been investigated by computer simulation. The trajectories of incident positive ions Ne were simulated in the binary collision approximation. Energy and angular distributions of Ne+ ions scattered from the GaP (100) surface in the <110>, <100> directions and target orientations were calculated. The computational results show that in the energy spectrum the characteristic peaks corresponding to scattering of ions by the surface atomic chains and semichannels are observed. The situation and intensity of these peaks depend on the forms of the surface semichannels. This technique can be useful for investigations of semiconductor structures.