AVS 47th International Symposium
    Surface Science Tuesday Sessions
       Session SS-TuP

Paper SS-TuP10
In situ Investigation of Stage Formation of Eutectic Alloys during Annealing Amorphous and Crystalline Silicon with Metals

Tuesday, October 3, 2000, 5:30 pm, Room Exhibit Hall C & D

Session: Poster Session
Presenter: B.B. Bokhonov, Institute of Solid State Chemistry SB RAS, Russia
Authors: B.B. Bokhonov, Institute of Solid State Chemistry SB RAS, Russia
M.A. Korchagin, Institute of Solid State Chemistry SB RAS, Russia
Correspondent: Click to Email
The in situ electron microscopic investigation of the formation of eutectic alloys in the system: amorphous film Si or crystalline thin foil (100)Si - particle Me (Me = Au, Ag, Cu, Al), showed the formation of eutectics is preceded by metal diffusion into amorphous silicon with the formation of metastable amorphous metal silicide. Supersaturation and decomposition of metastable metal silicide leads to the evolution of polycrystalline silicon. Morphological characteristics of liquid eutectic formation in system: crystalline silicon foil - metal particle are similar to well known morphological characteristics of the formation of etch pits in crystals. For the systems: crystalline silicon foil - metal particle (gold, silver and copper), oriented formation of the liquid evtectic are observed. The crystallization of liquid eutectic alloys leads to topotaxial evolution of metal silicide islands or compounds at the interface - eutectic alloy/silicon crystal.