AVS 47th International Symposium
    Nanotubes - Science and Applications Tuesday Sessions
       Session NM-TuP

Paper NM-TuP4
Emission Properties of Field Emission Triode using Carbon Nanotubes Grown on Glass Substrate

Tuesday, October 3, 2000, 5:30 pm, Room Exhibit Hall C & D

Session: Poster Session
Presenter: H.J. Kim, Sungkyunkwan University, Korea
Authors: H.J. Kim, Sungkyunkwan University, Korea
J.H. Han, Sungkyunkwan University, Korea
W.S. Yang, Sungkyunkwan University, Korea
J.B. Yoo, Sungkyunkwan University, Korea
Y.W. Jin, Sungkyunkwan University, Korea
J.E. Jung, Sungkyunkwan University, Korea
J.H. Yang, Sungkyunkwan University, Korea
C.Y. Park, Sungkyunkwan University, Korea
N.S. Lee, Samsung Advanced Institute of Technology, Korea
J.M. Kim, Samsung Advanced Institute of Technology, Korea
Correspondent: Click to Email
Carbon nanotubes are potential candidates for cold cathode field emitter because of high aspect ratio and small radii of curvature at their tips with high chemical stability, thermal conductivity, and mechanical strength. The vertical alignment of carbon nanotubes in large area is important to FED application. We have fabricated the triode for field emission display using carbon nanotube as an emission tip. First, 1.2 @micro@m thick SiN@sub x@ as an insulator was deposited on the Ni coated glass substrate with Cr buffer layer by PECVD, and 100nm thick Mo as a gate electrode was deposited by DC sputter. Carbon nanotubes were directly grown on substrate using selective area growth technique after gate opening and insulator etching using conventional lithography process. Vertically well-aligned multiwall carbon nanotubes weres grown by PEHFCVD(Plasma Enhanced Hot Filament Chemical Vapor Deposition). The carbon nanotubes were about 40nm in diameter. The emission characteristics of the fabricated carbon nanotube triode shows very low operating voltage compared to that of conventional Spindt-type FEDs. The uniformity of emission characteristics of nanotubes were evaluated in vacuum chamber using phosphor-coated anode. The morphology of nanotubes was examined by field emission scanning electron microscopy (FESEM).