AVS 47th International Symposium
    Nanotubes - Science and Applications Tuesday Sessions
       Session NM-TuP

Paper NM-TuP3
Effects of Metal-Catalyst and Buffer Layer on Growth and Emission Properties of Carbon Nanotubes

Tuesday, October 3, 2000, 5:30 pm, Room Exhibit Hall C & D

Session: Poster Session
Presenter: J.H. Han, Sungkyunkwan University, Korea
Authors: J.H. Han, Sungkyunkwan University, Korea
H.J. Kim, Sungkyunkwan University, Korea
W.S. Yang, Sungkyunkwan University, Korea
J.B. Yoo, Sungkyunkwan University, Korea
J.H. Yang, Sungkyunkwan University, Korea
C.Y. Park, Sungkyunkwan University, Korea
Y.H. Song, ETRI, Korea
K.S. Nam, ETRI, Korea
Correspondent: Click to Email
Carbon nanotubes have been extensively studied because of their own unique physical properties and their potential applications such as flat panel displays and vacuum microelectronics. In practical applications, roles of metal-catalyst and buffer layer, particularly, are very important to growth and adhesion of carbon nanotubes respectively. Therefore, a systematic study for metal-catalyst and buffer layer has been so indispensable. In our experiments, we have used buffer layer such as chrome or molybdenum or titanium to improve the adhesion between metal-catalyst layer (such as nickel, cobalt, and nickel-cobalt composite) and glass substrate. We have grown the vertically aligned carbon nanotube arrays on nickel-coated glass and silicon (100) with adhesive buffer layer at temperatures below 600°C by plasma enhanced chemical vapor deposition (PECVD). In this work, a dc plasma was employed, and acetylene gas was used as a carbon source and ammonia gas was used as a catalyst and dilution gas. We examined the effect of thickness of metal-catalyst and buffer layer on the growth and emission properties of carbon nanotubes. The emission characteristics of nanotubes were evaluated in vacuum chamber using phosphor-coated anode. The morphology of nanotubes was examined by field emission scanning electron microscopy (FESEM), and the microstructures of interface between metal-catalyst and buffer layer or buffer layer and glass (or silicon) were investigated by high resolution transmission electron microscopy (HRTEM).