AVS 47th International Symposium
    Flat Panel Displays Tuesday Sessions
       Session FP-TuP

Paper FP-TuP5
Investigation of the Outgassing Characteristics of the Materials Consisted of Plasma Display Panel

Tuesday, October 3, 2000, 5:30 pm, Room Exhibit Hall C & D

Session: Poster Session
Presenter: H.R. Han, Sungkyunkwan University, Korea
Authors: H.R. Han, Sungkyunkwan University, Korea
Y.J. Lee, Sungkyunkwan University, Korea
G.Y. Yeom, Sungkyunkwan University, Korea
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In the fabrication of PDP, before filling with light emitting gases (Xe+Ne, etc.) to the fabricated panel, the panels are exhausted through a small section glass pipe attached to one side of the rear glass substrate of the panel. Currently, this gas exhausting takes more than several hours to obtain a desirable vacuum state of around 10@super -7@Torr due to the outgassing from the materials inside of the panel. It is known that this gas exhausting process is one of the most time-consuming processes that reduces the production rate and increases the cost of PDP. However, at present, the affecting factors or the materials causing the severe outgassing from the panel during the exhausting are not well understood due to the variety of materials and complex processing involved in the fabrication of the PDP. In this study, outgassing characteristics of the materials consisted of PDP and PDP panel itself were systematically studied using a thermal desorption technique to understand the origin of the severe outgassing. The characteristics of outgassing were investigated as a function of time and temperature. As the investigated materials, electrode(metal, ITO), dielectric films, barrier rib, fluorescent films, protective layer(MgO), and frit on the glass panel and the multilayer of these materials consisted of PDP panel were used and they were heated up to 500°C. Also, these materials were kept at 350°C for a few hours to measure outgassing characteristics at 350°C which is the temperature used for the exhausting process in the fabrication of PDP. The result showed that the maximum outgassing temperature from the single materials was varied from 100°C to 150°C. Mass spectrometry measurements of the materials maintained at 350°C have shown that the severe outgassing is primarily related the MgO and fluorescent films. These behaviors were compare with outgassing from the complete panel.