AVS 47th International Symposium
    Flat Panel Displays Tuesday Sessions
       Session FP-TuP

Paper FP-TuP4
Effects of ZnO Buffer Layer on the Luminous Properties of Thin Film Phosphors Deposited on ZnO/ITO/Glass Substrate

Tuesday, October 3, 2000, 5:30 pm, Room Exhibit Hall C & D

Session: Poster Session
Presenter: Y.J. Kim, Kyonggi University, Korea
Authors: Y.J. Kim, Kyonggi University, Korea
Y.H. Jeong, Kyonggi University, Korea
S.M. Jeong, Kyonggi University, Korea
Correspondent: Click to Email
Thin film phosphors deposited on ITO(Indium tin oxide) coated glass panel have a disadvantage of lower cathodoluminescent brightness than powder types due to the poor crystalline quality. It is very difficult for thin film phosphors to have high quality crystal structures, because ITO has an amorphous like structure. To improve the cathodoluminescent properties of thin film phosphors, ZnO buffer layer was deposited by sputtering methode between thin film phosphors and ITO coated glass substrate. All thin film phosphors were deposited by rf magnetron sputtering method. Transparent c-axis preferentially oriented ZnO thin film buffer layer could be obtained on ITO thin film, while ITO had an amorphous like structure. ZnGa@sub 2@O@sub 4@:Mn and CaTiO@sub 3@:Pr thin film phosphors were used to evaluate the effects of ZnO buffer layer. The crystal structures of thin film phosphors deposited on ZnO/ITO/glass substrate were developed better than those on ITO/glass, consequently the formers showed cathodoluminescent intensity at least twice as high as the latter. CaTiO@sub 3@:Pr and ZnGa@sub 2@O@sub 4@:Mn thin film phosphors showed sharp CL emissions at 613nm and 509nm, respectively.