AVS 46th International Symposium
    Electronic Materials and Processing Division Monday Sessions

Session EM-MoA
Nitride Processing and Characterization

Monday, October 25, 1999, 2:00 pm, Room 608
Moderator: J.S. Speck, University of California, Santa Barbara


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm EM-MoA1
GaN-Based Diode Structures for Optoelectronic Applications in the Near Ultraviolet Range of the Spectrum
D. Starikov, I.E. Berishev, N. Badi, N. Medelci, J.-W. Um, A. Bensaoula, University of Houston
2:20pm EM-MoA2
High Breakdown Voltage Au/Pt/GaN Schottky Diode
J.I. Chyi, J.M. Lee, C.C. Chuo, G.C. Chi, National Central University, Taiwan, G. Dang, A.P. Zhang, X.A. Cao, M.M. Mshewa, F. Ren, S.J. Pearton, University of Florida, S.N.G. Chu, Bell Labs, Lucent Technologies, W.G. Wilson, Charles Evans and Associates
2:40pm EM-MoA3
Negative Electron Affinity and Electron Emission at Cesiated GaN and AlN Surfaces
C.I. Wu, A. Kahn, Princeton University
3:00pm EM-MoA4
Inductively Coupled Plasma-Induced Etch Damage of GaN p-n Junctions
R.J. Shul, L. Zhang, A.G. Baca, C.G. Willison, J. Han, Sandia National Laboratories, S.J. Pearton, F. Ren, University of Florida
3:20pm EM-MoA5
Schottky Diode Measurements of Dry Etch Damage in n- and p-type GaN
X.A. Cao, A.P. Zhang, G. Dang, F. Ren, S.J. Pearton, University of Florida, R.J. Shul, L. Zhang, Sandia National Laboratories
3:40pm EM-MoA6
Process Development for Dry-etched Laser Facets on GaN
L. Zhang, R.J. Shul, G.A. Vawter, C.G. Willison, C.Y. Gao, J. Han, Sandia National Laboratories, S.J. Pearton, University of Florida
4:00pm EM-MoA7
Photo-Assisted RIE of III-V Nitrides in BCl@sub 3@/Cl@sub 2@/Ar/N@sub 2@
N. Medelci, I.E. Berishev, D. Starikov, A. Bensaoula, University of Houston, M. Gonin, K. Fuhrer, A. Schultz, Ionwerks
4:20pm EM-MoA8
Effect of N@sub 2@ Discharge Treatment on AlGaN/GaN HEMT Ohmic Contact Using Inductively Coupled Plasma
A.P. Zhang, G. Dang, X.A. Cao, F. Ren, S.J. Pearton, University of Florida, J.M. Van Hove, P.P. Chow, R. Hickman, J.J. Klaasen, SVT Associates
4:40pm EM-MoA9
In-Situ Plasmas Diagnostics for the Etchings of AlGaN/GaN Heterostructures
H.S. Kim, G.Y. Yeom, SungKyunKwan University, South Korea, J.W. Lee, T.I. Kim, Samsung Advanced Institute of Technology, South Korea