AVS 46th International Symposium
    Vacuum Technology Division Tuesday Sessions
       Session VT-TuP

Paper VT-TuP1
RGA Spectra of Vacuum System Contamination from Typical Cleaning and Handling Sources

Tuesday, October 26, 1999, 5:30 pm, Room 4C

Session: Poster Session
Presenter: R.S. Goeke, Sandia National Laboratories
Authors: R.S. Goeke, Sandia National Laboratories
J.A. Romero, Sandia National Laboratories
Correspondent: Click to Email
A library of typical RGA spectra has been generated for commonly used cleaning and handling materials that may lead to contamination in a baked vacuum system. Some of the materials analyzed were: Nitrile gloves, Brulin & Citrodet aqueous based cleaners, Fluoroware, Scotchbrite pads. Spectra were generated using a UHV desorption system with a Quadrupole Gas Analyzer. The purpose of the analysis was to generate a finger print library of possible contamination sources, which could be used to identify contamination in a production system. @FootnoteText@ Sandia is a multiprogram laboratory operated by Sandia corporation, a Lockheed Martin Company, for the United States Department of Energy under contract DE-AC04-94AL85000.