AVS 46th International Symposium
    Surface Science Division Wednesday Sessions
       Session SS2+AS+PS-WeM

Paper SS2+AS+PS-WeM11
Hyperthermal-energy Ion Scattering on Si(100)

Wednesday, October 27, 1999, 11:40 am, Room 607

Session: Ion-Surface Interactions I
Presenter: C.L. Quinteros, University of Notre Dame
Authors: C.L. Quinteros, University of Notre Dame
S.I. Tzanev, University of Notre Dame
D.C. Jacobs, University of Notre Dame
Correspondent: Click to Email
Ion-surface scattering experiments on a Si(100) surface are presented, introducing a new gas/surface experimental system with unique capabilities. Using a Colutron type source, an ion beam with energies between 5-300 eV can be generated. The ions are extracted, accelerated, mass-selected by a Wein filter, decelerated and focused on the surface target. Scattered ions and neutral products are mass- and energy-resolved with a fully rotatable, differentially-pumped detector that includes an ionization source for detection of neutrals, a cylindrical electrostatic analyzer for energy selection, and a quadrupole mass spectrometer for mass selection of the energy-filtered particles. Incident angles between 0-90° and scattering angles between 0-150° can be accessed by independent rotation of the sample manipulator and the detector. A complement of surface analysis techniques (LEED, Scanning Auger Electron Spectroscopy, X-Ray Photoelectron Spectroscopy, and a Kelvin Probe) monitor surface modifications resulting from ion-beam exposure. The surface sample can be cooled to 80K through a liquid nitrogen reservoir or resistively heated to 1000K. The hyperthermal energy range spans from thermal energies (<1eV), where chemical interactions produce inelastic scattering events, to the low energy regime (1-5 keV), where predominantly elastic scattering occurs. We present scattering results for a series of different projectiles on Si(100) that bridge these two energy regimes. The charge state and energy distributions of the scattered products are reported as a function of collision energy and scattering angle.