AVS 46th International Symposium
    Organic Electronic Materials Topical Conference Monday Sessions
       Session OE+EM+FP-MoA

Paper OE+EM+FP-MoA7
Electron Beam Patterning of Amine-Functionalized Self-Assembled Monolayers

Monday, October 25, 1999, 4:00 pm, Room 616/617

Session: Transport and Nanostructures in Organic Films
Presenter: C.K. Harnett, Cornell University
Authors: C.K. Harnett, Cornell University
K.M. Satyalakshmi, Cornell University
M.G. Metzler, Cornell University
D.R. Medeiros, IBM T.J. Watson Research Center
H.G. Craighead, Cornell University
Correspondent: Click to Email
Amine-functionalized self-assembled monolayers form a hydrophilic surface that can strongly attach other materials. Examples of materials that have been selectively deposited on patterned amine monolayers include nanoparticles,@footnote 1@ metals, fluorescent molecules, and biological cells.@footnote 2@ Nanopatterning of reactive monolayers is therefore of great practical interest. We have studied electron-beam patterning of 3-aminopropyltriethoxysilane (APTS) and other self-assembled monolayers. Submicron features that are difficult to achieve with UV lithography or microcontact printing are accessible with electron beams. Exposed patterns are examined with lateral-force microscopy (LFM) to determine pattern quality vs. electron dose. At 20 kV, a dose of 300 µC/cm@super 2@ is required to produce continuous 1-micron lines. Results from several electron energies will be presented, with the goal of using these monolayers in a low-energy (1-2 kV) electron-beam lithography system. Exposed areas are analyzed with grazing angle IR spectroscopy to determine possible exposure mechanisms. Subsequent deposition of metals, and use of protection-group chemistry to produce a tone-reversed pattern, will also be discussed. @FootnoteText@ @footnote 1@ T. Vossmeyer, S. Jia, E. Delonno, M. R. Diehl, S.-H. Kim, X. Peng, A. P. Alivisatos, J. R. Heath, Journal of Applied Physics 84, 3664-3670 (1998) @footnote 2@ C. S. Dulcey, J. H. Georger, V. Krauthammer, D. A. Stenger, T. L. Fare, J. M. Calvert, Science 252, 551-554 (1991).