AVS 46th International Symposium
    Organic Electronic Materials Topical Conference Monday Sessions
       Session OE+EM+FP-MoA

Paper OE+EM+FP-MoA4
Self-Assembled, Template-Based Nanolithography

Monday, October 25, 1999, 3:00 pm, Room 616/617

Session: Transport and Nanostructures in Organic Films
Presenter: S.R. Cohen, Weizmann Institute of Science, Israel
Authors: S.R. Cohen, Weizmann Institute of Science, Israel
R. Maoz, Weizmann Institute of Science, Israel
E. Frydman, Weizmann Institute of Science, Israel
J. Sagiv, Weizmann Institute of Science, Israel
Correspondent: Click to Email
The versatility of our recently developed technique@footnote 1@ for scanning probe microscope (SPM)-based, non-destructive nanolithography on an organized organic monolayer template is demonstrated here. By building on, rather than destroying the organic "resist", consisting of an ordered self assembled monolayer (SAM), it is possible to construct complex 3 dimensional structures which can ultimately lead to device formation. In the first step, applying a bias voltage between a conductive SPM tip and a silver thiolate-based monolayer surface site leads to "activation" of that site by the tip. The second step, deposition of metal (silver) from solution by interaction with an enhancing solution which specifically deposits silver on these sites, leads to in-situ formation of metallic features with sub-micron resolution. These features are chemically bound to the surface-altered monolayer, and comprise a three-dimensional structure of surface-bound silver. The fabrication of conducting nanowires is demonstrated, which could be extended to device or nanocircuit formation. The formation of complex, three-dimensional structures with order determined by the underlying monolayer has been demonstrated. Considering that the surface template exhibits molecular order, this technique has the potential of creating molecular-scale devices, using standard ambient application of SPM, and solution chemistry. @FootnoteText@ @footnote 1@ R. Maoz, S.R. Cohen, and J. Sagiv, Adv. Mater. 11, 55 - 61 (1999).