AVS 46th International Symposium
    Topical Conference on Emerging Opportunities and Issues in Nanotubes and Nanoelectronics Wednesday Sessions
       Session NT+NS+EM+MS-WeP

Paper NT+NS+EM+MS-WeP3
Aligned Carbon Nanotubes with Controlled Diameters Using Anodic Alumina Template

Wednesday, October 27, 1999, 5:30 pm, Room 4C

Session: Poster Session
Presenter: S.-H. Tsai, National Tsing Hua University, R.O.C.
Authors: S.-H. Tsai, National Tsing Hua University, R.O.C.
H.C. Shih, National Tsing Hua University, R.O.C.
Correspondent: Click to Email
The microwave plasma enhanced chemical vapor deposition (MPECVD) system had been successfully fabricated the well-controlled diameters of aligned carbon nanotubes on the anodic alumina template with a mixture of methane and hydrogen. Prier to test, the anodic alumina with pore arrays in various diameters were prepared by anodizing aluminum using oxalic, sulfuric, and phosphoric acid solutions. By adjusting the pore size of the anodic alumina, various carbon nanotube diameters can be obtained in a range of 30 to 100 nm and were examined by scanning electron microscopy and transmission electron microscopy.