AVS 46th International Symposium
    Flat Panel Displays Topical Conference Tuesday Sessions
       Session FP-TuM

Paper FP-TuM8
Fabrication of OLED Devices on Flexible, Ultra-barrier Plastic Substrates

Tuesday, October 26, 1999, 10:40 am, Room 604

Session: Novel Materials for Field Emission Displays and Technologies for Flexible Displays
Presenter: G.L. Graff, Battelle Pacific Northwest National Laboratory
Authors: G.L. Graff, Battelle Pacific Northwest National Laboratory
M.E. Gross, Battelle Pacific Northwest National Laboratory
P.A. Mounier, Battelle Pacific Northwest National Laboratory
M.K. Shi, Battelle Pacific Northwest National Laboratory
M.G. Hall, Battelle Pacific Northwest National Laboratory
J.J. Brown, Universal Display Corporation
J.K. Mahon, Universal Display Corporation
C.I. Bright, Delta V Technologies
P.E. Burrows, Princeton University
Correspondent: Click to Email
To develop displays on flexible polymeric film substrates, transparent ultra-barriers to oxygen and moisture must be provided. The acceptable value of permeation will depend on the sensitivity of the particular display technology. A multilayer film structure with alternate layers of organic polymer and metal oxide, has demonstrated oxygen and moisture permeation rates below the measurement limit of commercial instrumentation (<0.005 O2 cc/m2/day, H2O g/m2/day). This highly transparent, multilayer ultra-barrier coating was deposited by roll-to-roll compatible, vacuum deposition processes. The Polymer MultiLayer (PML) process for vacuum evaporation of organic monomers and in-situ polymerization, was used to deposit the organic layers. DC reactive magnetron sputtering was used to produce the aluminum oxide barrier layers. A transparent conductive coating of ITO was sputter deposited over these ultra-barrier layers to provide a transparent electrode for display construction. Typical performance for a 135 nm thick ITO layer, deposited on a double hardcoated PET (7 mil thick) substrate with ultra-barrier layers, was = 85%T and = 70 ohms/square. OLED devices have been fabricated using the flexible, ultra-barrier substrates, and preliminary device performance will be reported.