AVS 45th International Symposium
    Electronic Materials and Processing Division Tuesday Sessions

Session EM+SE-TuM
Critical Issues in Widebandgap Semiconductors

Tuesday, November 3, 1998, 8:20 am, Room 316
Moderator: M.R. Melloch, Purdue University


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am EM+SE-TuM1 Invited Paper
Gallium Nitride Structures for High Power Microwave Amplification
L.F. Eastman, K. Chu, N. Weimann, J. Smart, J.R. Shealy, Cornell University
9:00am EM+SE-TuM3
HfN Films Grown on GaN by Reactive MBE using Ammonia@footnote 1@
A. Parkhomovsky, B.E. Ishaug, A.M. Dabiran, P.I. Cohen, University of Minnesota
9:20am EM+SE-TuM4
Investigation of Metal / GaN Interface Properties using Photoemission Spectroscopy and I-V Measurements
C.I. Wu, A. Kahn, Princeton University
9:40am EM+SE-TuM5
Mg Doping Studies of ECR-MBE GaN Thin Films
I.E. Berishev, E. Kim, O. Kameli, D. Starikov, A. Bensaoula, University of Houston
10:00am EM+SE-TuM6
Deposition of AlN Gate Dielectrics
B. Gila, S.M. Donovan, C.R. Abernathy, K.N. Lee, J.D. MacKenzie, F. Ren, S.J. Pearton, University of Florida, Gainesville, S.N.G. Chu, Bell Laboratories, Lucent Technologies
10:20am EM+SE-TuM7 Invited Paper
Progress in SiC: From Material Growth to Commercial Device Development
C.H. Carter, V.F. Tsvetkov, D. Henshall, O. Kordina, K. Irvine, R. Singh, S.T. Allen, J. Palmour, Cree Research, Inc.
11:00am EM+SE-TuM9
Critical Development Issues for Deep (10 to 100 µm) Etching of SiC
D.C. Sheridan, Auburn University, J.B. Casady, Northrop Grumman, C.E. Ellis, Auburn University, R.R. Siergiej, Northrop Grumman, J.D. Cressler, Auburn University, W.E. Urban, W.F. Valek, H. Buhay, Northrop Grumman
11:20am EM+SE-TuM10
Thermochemical Stability of Plasma-Deposited Silicon Oxycarbide Thin Films Subjected to Post-Deposition Rapid Thermal Annealing
D.M. Wolfe, B. Ward, F. Wang, M. Xu, G. Lucovsky, R.J. Nemanich, D.M. Maher, North Carolina State University