AVS 45th International Symposium
    Vacuum Technology Division Tuesday Sessions
       Session VT-TuM

Paper VT-TuM7
Flow Investigation of Siegbahn Pump by CFD Methodology

Tuesday, November 3, 1998, 10:20 am, Room 329

Session: Molecular Drag Pumping
Presenter: H.-P. Cheng, Precision Instrument & Development Center, Tawain. Read by J. Helmer, with historical figures by L. Westerberg.
Correspondent: email address not available
The maximum flow through turbomolecular pumps or turbodrag pumps is limited by the maximum rotor temperature resulting from gas friction. Further, a variety of applications, especially in the semiconductor industry, require a high pumping speed in the 1 - 100 mtorr pressure range. Main subject of the presentation is the special design of the drag section of a turbodrag pump and the resulting improvements related to the features: maximum gas flow and high pumping speed in the 1 - 100 mtorr pressure range.