AVS 45th International Symposium
    Vacuum Technology Division Tuesday Sessions
       Session VT-TuM

Paper VT-TuM6
Matching of Turbine Stages to a Drag Stage under Viscous Flow Conditions

Tuesday, November 3, 1998, 10:00 am, Room 329

Session: Molecular Drag Pumping
Presenter: P.J. Klingner, Leybold Vacuum GmbH, Germany
Authors: Ch. Beyer, Leybold Vacuum GmbH, Germany
H. Englaender, Leybold Vacuum GmbH, Germany
P.J. Klingner, Leybold Vacuum GmbH, Germany
Correspondent: Click to Email
The design of the adapter part between the turbo molecular part and the drag stage of a compound pump is decisive for - the high vacuum performance (a) the fore vacuum pressure tolerances (b) the manufacturing costs and (c) the degree of compactness of this pump (d) especially in process applications under viscous or molecular-viscous transition flow conditions. The authors present approaches for the layout of turbo rotor stages at viscous flow (Leybold Advanced Technology). Operation diagrams illustrate the combination of turbo molecular and drag stages as part of pump optimization; measurement data give first informations about the influence of specially designed filling stages on the adapter efficiency.