AVS 45th International Symposium
    Thin Films Division Tuesday Sessions
       Session TF-TuM

Invited Paper TF-TuM7
Thin Film Gas Sensors Based on Metal Oxides

Tuesday, November 3, 1998, 10:20 am, Room 310

Session: Thin Films for Sensing and Data Storage
Presenter: H. Meixner, Siemens AG, Germany
Authors: H. Meixner, Siemens AG, Germany
M. Fleischer, Siemens AG, Germany
Correspondent: email address not available
Recently, research into the characteristics of semiconductor metal oxides that are stable at high temperatures with a view to providing reproducible detection of oxygen and reducing gases has intensified. First of all, there is a discussion of the specifics relating to these materials, for example the reduction of the effects of grain boundary barriers on the conduction mechanism, the reduction of the humidity cross sensitivities and also on the various reaction mechanisms. Then, the technology for constructing gas sensors of this kind will be described. Examples that have already been implemented, say, @gamma@ detection, O@sub 2@ measurements in the exhaust gases from incinerators, methane alarms, and air quality control as well as certain trends in development are discussed. Keywords: Metal Oxides, Thin Films, High Temperatures, Conduction Mechanisms, Gas Sensors