Recently, multicomponent oxides composed of combinations of binary compounds or ternary compounds have attracted much attention as new materials for transparent and conductive thin films. This paper introduces transparent conducting multicomponent oxide films prepared with varied chemical compositions by magnetron sputtering. It was found that most multicomponent oxides composed of combinations of binary compounds contained at the least one ternary compound; highly transparent and conductive films could be prepared in the ternary compound. In addition, if binary or ternary compounds which produced transparent and conductive films when prepared by magnetron sputtering were used as the starting materials, transparent and conductive films composed of combinations of these binary or ternary compounds could be also produced from all compositions in the resulting multicomponent oxides. In addition, it was found that most of the properties of transparent conducting multicomponent oxide films were mainly determined by the metal element contained in the oxide. It can be concluded that transparent conducting multicomponent oxide films are suitable for specialized applications because their electrical, optical and chemical properties as well as physical properties such as band-gap energy, refractive index and work function can be controlled by changing the chemical composition.