AVS 45th International Symposium
    Surface Science Division Thursday Sessions
       Session SS-ThP

Paper SS-ThP23
Local Composition and Electronic and Optical Properties of Cr Oxide-Based Thin Films

Thursday, November 5, 1998, 5:30 pm, Room Hall A

Session: Surface Science Division Poster Session
Presenter: J. Smith, The University of Pennsylvania
Authors: J. Smith, The University of Pennsylvania
D.A. Bonnell, The University of Pennsylvania
P. Carcia, E.I. Dupont de Nemours
R.H. French, E.I. Dupont de Nemours
X.F. Lin, The University of Pennsylvania
Correspondent: Click to Email
Oxynitride thin films are increasingly used to optimize resolution in optical lithography. Recently, a series of complex Cr-O-C-N films have been developed that allow simultaneous precise control over optical transmission, reflection, and phase shift. Subtle variations in optical properties appear to be related to small differences in O:C:N bond ratios across 100 nm films. To understand the mechanisms by which variations in anion coordination affect properties, the electronic structure near the Fermi level and local electrical conductivity measured by tunneling spectroscopy was related to optical properties in the end member compositions. Results from CrOx, CrCx, and CrNx this films, where x varies from 0.1 to 0.7, will be discussed in terms of the relationship between electronic and optical density and the consequence to optical properties.