Paper TF-WeP32
Influence of Silicon Addition on the Mechanical and Tribological Properties of Zirconium Nitride Coatings Deposited by Hybrid Deposition System

Wednesday, December 5, 2018, 4:00 pm, Room Naupaka Salon 1-3

Zr–Si–N coatings with various Si contents were synthesized by a hybrid deposition system combining arc ion plating and d.c. magnetron sputtering techniques. The influence of the Si content on the microstructure, mechanical properties and tribological properties of the Zr–Si–N coatings were investigated. The results showed that as the Si content increased from 0 to 5.8 at.%, the coatings transformed from a columnar ZrN to nanocomposite structure with a nano-sized ZrN crystallites embedded in amorphous Si₃N₄ matrix and further increases of Si content lead to amorphous-like coatings. XPS analysis was applied to ZrN film and Zr–Si(5.8 at.%)–N film respectively. The main peaks at 179.9 and 182.3 eV with a large percentage of area correspond to the ZrN compound. There was also a small contribution from the ZrO₂ oxide phase at 182.16 and 184.59 eV. For the Si 2p region, the silicon binding energy spectrum is also divided into two peaks. The major peak located at 101.8 eV corresponds to Si₃N₄ compound. The maximum hardness (H) of 33 Gpa, Young’s modulus € of 265 Gpa, and H/E* value of 0.12 were obtained at Si content of 5.8 at.% in the Zr–Si–N coatings, respectively. The coating with the lowest friction coefficient and the best wear resistance was also obtained at Si content of 5.8 at.%, which was mainly contributed to high value of H/E* and formation of SiO₂ or Si(OH)₄ self-lubricating layer due to the interface tribo-chemical reaction.