Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2018)
    Thin Films Wednesday Sessions
       Session TF-WeP

Paper TF-WeP2
Effect of Modulation Structure on the Microstructural and Mechanical Properties of TiAlSiN/CrN Thin Films Prepared by HiPIMS Process

Wednesday, December 5, 2018, 4:00 pm, Room Naupaka Salon 1-3

Session: Thin Films Poster Session II
Presenter: Chi-Lung Chang, Department of Materials Engineering, Ming Chi University of Technology, Taiwan, Taiwan, Republic of China
Authors: H. Liu, Institute of Advanced Wear & Corrosion Resistant and Functional Materials, Jinan University, China
F.C. Yang, Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, Taiwan
Y.J. Tsai, Department of Materials Engineering, Ming Chi University of Technology, Taiwan
C.L. Chang, Department of Materials Engineering, Ming Chi University of Technology, Taiwan, Taiwan, Republic of China
Correspondent: Click to Email
The TiAlSiN/CrN multilayer coatings were deposited on silicon Si (100) substrates and cemented carbide (WC-10 wt.%, Co) substrates at 80℃ using both metallurgical TiAlSi alloy target and Cr target, with varying modulation period (Λ) from 27 nm to 2 nm, by reactive high power impulse magnetron sputtering technique (HiPIMS). The modulation structure characteristics of the TiAlSiN/CrN multilayer was first investigated, and then the microstructure evolution and mechanical properties of TiAlSiN/CrN coatings with decreasing modulation period (Λ) were analyzed by TEM, SEM, XRD, Scratch test, Rockwell hardmeter and nanoindenter. It was found that the grain size of TiAlSiN/CrN multilayer increased with a decreasing modulation period (Λ). The hardness and elastic modulus of the multilayer reached their maximum when Λ is about 8.5 nm. The hardness, H3/E*2 ratios and critical loads LC in scratch test showed an initial increase, followed by a decrease with a decreasing modulation period (Λ). The modulation period (Λ) at 8.5 nm exhibited the highest hardness, H3/E*2 ratios and critical loads.