Invited Paper NM-TuM5
Nanomaterials-enabled Advances in Microfabricated Sensors for Environmental and Health Monitoring
Tuesday, December 4, 2018, 9:20 am, Room Naupaka Salon 5
Accurate detection of toxic and flammable gases is critical to public health and the environment, and to the safe operation of many industrial processes. This presentation will discuss our efforts in low-power gas sensing for health, environmental and process monitoring. The core technology is a suspended polycrystalline silicon microheater functionalized with a number of nanotechnology-based sensing materials, targeting various analytes. Our microheater platform will be described and the latest results in sensitive, selective, and stable detection of several target gas molecules (including H2, propane, CO and NO2) will be presented. The talk will end with plans for future directions.