Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2016)
    Nanomaterials Tuesday Sessions
       Session NM-TuM

Paper NM-TuM1
Fabrication of Nanoplasmonic Pore on the Pyramid for Single Molecule Analysis

Tuesday, December 13, 2016, 8:00 am, Room Hau

Session: Nanofabrication and Nanodevices I
Presenter: SeongSoo Choi, Research Center for Nanobio Science, SunMoon University, Republic of Korea
Authors: S. Choi, Research Center for Nanobio Science, SunMoon University, Republic of Korea
M.J. Park, Research Center for Nanobio Science, SunMoon University, Republic of Korea
C.H. Han, Research Center for Nanobio Science, SunMoon University, Republic of Korea
S.J. Oh, Research Center for Nanobio Science, SunMoon University, Republic of Korea
T. Yamaguchi, Research Center for Nanobio Science, SunMoon University, Republic of Korea
Y.S. Kim, Sungkyunkwan University, Korea, Republic of Korea
N.K. Park, School of Electrical Engineering, Seoul National University, Republic of Korea
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There have been tremendous interests about the portable single molecule sensor device by using nanopore detection techniques. Recently the portable genome sequencing device based on the electrical detection technique was fabricated, however, the very high error rate during detection process was reported. In this report, we will report the nanoplasmonic Au nanopore fabrication by using diffusion of atoms, or drilling a freestanding thin film under high electron beam irradiation. For diffusion techniques, the Au apertures with ~ 100 nm diameter were fabricated by using focused ion beam technique followed by electron beam irradiations. The Au nanoclusters were formed on the diffused membrane several months later under the room environment after electron beam irradiations. In addition, drilling a freestanding 40 nm thick Au membrane was successfully carried out. Due to unstable electron beam irradiation on the nanoscale spot, we observed a crescent shape aperture with 0.75 nm width on the freestanding Au film. The fabricated nanopore surrounded with periodically patterned grooves can enhance the optical transmission and enhance the optical intensity due to plasmonic hot spot at the pore area. The controlled nanopore can be utilized as single molecule translocation and analysis by using optical detection and optically driven technique.