Pacific Rim Symposium on Surfaces, Coatings and Interfaces (PacSurf 2016)
    Energy Harvesting & Storage Wednesday Sessions
       Session EH-WeP

Paper EH-WeP5
Application of XPS and UPS to the Characterization of LixPOyNz Surfaces

Wednesday, December 14, 2016, 4:00 pm, Room Mauka

Session: Energy Harvesting & Storage Poster Session
Presenter: David Surman, Kratos Analytical Inc.
Authors: D.J. Surman, Kratos Analytical Inc.
J. Counsell, Kratos Analytical Ltd., UK
S.J. Coultas, Kratos Analytical Ltd., UK
C. Moffitt, Kratos Analytical Inc.
C.J. Blomfield, Kratos Analytical Ltd., UK
Correspondent: Click to Email

Lithium ion batteries are commonly found in home electronic equipment. In recent times there have been significant efforts to improve the durability, cycle time and lifetime decay of the batteries and in particular the electrode/electrolyte material. Novel materials have been developed that also increase the energy storage density. Lithium phosphorus oxynitride (LiPON) has become one of the most commonly used solid electrolyte thin-films in energy storage devices. Obviously, due to the widespread use of this material, there is significant interest in understanding the characteristics and properties with a view towards optimization.

We have applied both XPS and UPS to explore the surface and bulk properties of several LixPOyNz surfaces prepared via atomic layer deposition ALD [1]. The distribution of elements below the surface is explored using ion and angular-resolved depth profiling methods. This technique has been used extensively across a broad range of applications however the damage caused by impinging ions on the structure of the analyzed material has always been a concern for the analyst. Recently Argon gas cluster ion sources have been employed to reduce the chemical damage of organic materials and broaden the range of materials amenable to this type of analysis. Here we extend the application of cluster ions beyond organics to inorganic oxides. We will present how, with the use of Ar250-3000+ ions, where the energy per atom can be 2.5-40 eV, it is possible to obtain more accurate information regarding the true nature of the LiPON thin-film. A comparison is made with conventional monatomic depth profiles and in particular the differences in stoichiometry that is obtained with the two different ion sources. Ion implantation is also discussed as are the unfortunate chemical effects of carbon deposition from organic cluster ions. We will demonstrate how the analyst can now confidently depth profile through inorganic metal oxide thin-films without the worry of reduction or preferential sputtering.

[1] Alexander C. Kozen, Alexander J. Pearse, Chuan-Fu Lin, Malachi Noked, Gary W. Rubloff, DOI: 10.1021/acs.chemmater.5b01654