Plasma Science and Technology Division

 

The current Plasma Science and Technology Division (PSTD) evolved from the earlier Fusion Technology Division (FTD), which was founded in 1980, due largely to Manfred Kaminsky, who served as the first chair in 1981, after Don Mattox had been appointed the interim chair in 1980. The FTD serviced a fairly small, but very active, group of workers in aspects of fusion programs.  The initial membership of 100 grew to 430 in 1981. Plasmas were of course a topic of interest for both fusion and semiconductor processing applications and the division members were polled in 1986 to determine if they would agree to a name change to embrace plasmas which were not involved in fusion. The proposal for the expansion was initially made by Fred Dylla, who was chair in 1984, and supported by the 1986 chair, Angus Hunt. The latter wrote an article in the AVS Newsletter setting out the argument for the change; plasma-material interactions were very important not only for fusion reactors (i.e. wall effects) but in accelerator beams, sputtering, etc. and fusion was too narrow a field to attract many papers.

 

The change to the Plasma Science and Technology Division (PSTD), and the new by-laws, was approved by the Division membership and became official on January 1, 1986. The scope of the Division was expanded to include general plasma-materials interactions, plasma diagnostics, plasma-assisted etching and coating, and plasma processing technology. Robert Langley was the first chair of the expanded PSTD.

 

The FTD and PSTD Chairs were:

 

1980

Don Mattox

FTD

1981

Manfred S Kaminsky

 

1982

Manfred S Kaminsky

 

1983

William J Lange

 

1984

H Frederick Dylla

 

1985

R Jay Fries

 

1986

Angus L Hunt

PSTD

1987

Robert A Langley

 

1988

Timothy M Henderson

 

1989

Paul LaMarche

 

1990

Stephen M Rossnagel

 

1991

Arthur E Pontau

 

1992

David N Ruzic

 

1993

Richard A Gottscho

 

1994

Joseph L Cecchi

 

1995

David B Graves

 

1996

Lee A Berry

 

1997

Mark J Kushner

 

1998

John Chung Lee

 

1999

Linda M Cecchi

 

2000

Vincent Donnelly

 

2001

Joseph L Cecchi

 

2002

Amy E Wendt

 

2003

Ellen R Fisher

 

2004

Karen Seaward

 

 

The objectives of the Division are given on the division’s web page as:

 

The Plasma Science and Technology Division provides a forum for those interested in the entire range of plasma science and technology, extending from fundamental modeling studies to manufacturing applications.

Common themes at PSTD-supported conferences include:

*        Plasma diagnostics and modelling

*        Plasma-surface and ion-surface interactions

*        Plasma damage

*        Pattern transfer and feature profile evolution

          Plasma chemistries and processes

 

The Division awards an annual Prize in Plasma Science and Technology to senior researchers who have contributed significantly to the field of plasma science. The award winners were:

 

1999

Mark Kushner

Univ of Illinois-Champagne-Urbana

2000

Rod Boswell

Australian National University

2001

David Graves

UC Berkeley

2002

Greg Hebner

Sandia National Labs

2003

Vince Donnelly

 

 

 

In 1992, the Division initiated the John Coburn & Harold Winters Student Award in Plasma Science and Technology for the best student oral presentation at the Symposium,

 

1992

 

 

1993

Maria Barone

Univ. of California

1994

Bruce Kellerman

Univ. of Texas, Austin

1995

No Award

 

1996

Jane Chang

M.I.T.

1997

Mikhail Malyshev

Princeton Univ.

1998

Catherine Labelle

M.I.T.

1999

Erwin Kessels

Eindhoven Univ. of technology

2000

Siva Kanakasabapthy

Univ. of Texas, Dallas

2001

Nicholas Fuller

Columbia Univ.

2002

Lin Sha

Univ. of California, Los Angeles

2003

 

 

 

In 1992, the Division initiated travel awards for students who presented papers at the annual Symposium. In 1993, seven students were given travel awards; one of these was also the winner of the best student paper award. Travel awards were discontinued in 1999 with the initiation of the AVS Dorothy M. and Earl S. Hoffman Travel Grants.

 

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