| AVS 64th International Symposium & Exhibition | |
| Vacuum Technology Division | Thursday Sessions |
| Session VT-ThA |
| Session: | Surface Science for Accelerators |
| Presenter: | Katharina Battes, Karlsruhe Institute of Technology (KIT), Germany |
| Authors: | K. Battes, Karlsruhe Institute of Technology (KIT), Germany C. Day, Karlsruhe Institute of Technology (KIT), Germany V. Hauer, Karlsruhe Institute of Technology (KIT), Germany |
| Correspondent: | Click to Email |
In general, ceramics show interesting mechanical, thermal and electrical properties and are supposed to have relatively low outgassing rates. Therefore, in vacuum applications they are often used for feedthroughs for example. However, quantitative numbers on outgassing of most of the ceramic materials are hard to find in literature.
For this reason the outgassing of different ceramic materials was studied at the Outgassing Measurement Apparatus (OMA), which uses the difference method. First, oxide ceramics like alumina, magnesia, silica, and MACOR®, which consists of silica and other oxide ceramics, were measured. All measurements were performed at room temperature, 100 °C and 200 °C to investigate the temperature behavior of outgassing. Additionally, the outgassing species were determined by a quadrupole mass spectrometer.
The paper shows quite low outgassing rates for most of the examined ceramics. After 100 h at room temperature an outgassing rate of about 2·10-8 (Pa∙m3)/(s∙m2) is achieved for alumina for example. The mass spectra show similar residual gas spectra as seen for metals. Thus, these materials can be used in ultra-high vacuum applications.