| AVS 64th International Symposium & Exhibition | |
| Vacuum Technology Division | Thursday Sessions |
| Session VT-ThA |
| Session: | Surface Science for Accelerators |
| Presenter: | Martin Wüest, INFICON Ltd., Liechtenstein |
| Authors: | B. Andreaus, INFICON Ltd., Liechtenstein C. Strietzel, INFICON Ltd., Liechtenstein M.P. Wüest, INFICON Ltd., Liechtenstein C. Guerra-Nuñez, Empa, Swiss Federal Laboratories for Materials Science and Technology, Switzerland M. Ruoho, Empa, Swiss Federal Laboratories for Materials Science and Technology, Switzerland I. Utke, Empa, Swiss Federal Laboratories for Materials Science and Technology, Switzerland J. Michler, Empa, Swiss Federal Laboratories for Materials Science and Technology, Switzerland X. Mäder, Empa, Swiss Federal Laboratories for Materials Science and Technology, Switzerland M. Polyakov, Empa, Swiss Federal Laboratories for Materials Science and Technology, Switzerland |
| Correspondent: | Click to Email |
Process industry is constantly changing. New manufacturing processes using new chemistries are developed. Yet, quality and cost pressure demand that processes are highly reliable, repeatable and need fewer maintenance interruptions. For vacuum sensors this means that they need to have a longer life in process before they need to be exchanged due to sensor degradation caused by process corrosion. To cope with this, we have investigated ways to protect the vacuum sensors from process related influences. Coatings are a good way to protect a surface from corrosion while leaving the underlying structural part without change. Coatings can be adapted to the changing customer needs. We will present results from experiments we have done with gauges and components using different protective layers.